Custom probe stations

Cryogen-free superconducting magnet probe station

• 3 T or 5 T vertical magnetic field
• 2 K to 420 K (maximum field reduced above room temperature)
• Optional 6.5 in diameter sample holder for zero field measurements
• <1 µm vibration at the sample stage

Custom liquid helium/liquid nitrogen cooled probe stations

• Up to 8 in sample size
• Up to 3 kV voltage on probe arms and isolated sample holder
• ~3.5 K to 475 K (675 K optional); may vary for custom options—consult Lake Shore
• 25 nm vibration at the sample stage

Room temperature vacuum probe station

• 300 K to 500 K (675 K option)
• 2 in diameter sample holder with standard arm and vision options

Miniature, transportable vacuum chamber

Lake Shore also offers a miniature, transportable sample vacuum chamber capable of maintaining a sample in vacuum during transportation via an atmosphere environment. The vacuum chamber can be used for transferring wafer/substrates under vacuum from a glove box with a special environment into a vacuum or cryogenic micro-manipulated probe station (or into a vacuum chamber) and back into the glove box after testing, measurements, or preparations. This transportable vacuum chamber protects the wafer/substrates from atmospheric contamination both on loading and unloading.

Unlike a common vacuum load-lock, the vacuum chamber has the following features and benefits:

• Typical sizes of 50 mm diameter and 25 mm thickness
• No gate valves required
• Very convenient and easy operation
• Low cost
• Mount the transportable sample mount without increasing base temperature of the cryogenic probe station